Air-dielectric for subtractive etch line and via metallization

ABSTRACT

A method and structure is disclosed whereby multiple interconnect layers having effective air gaps positioned in regions most susceptible to capacitive coupling can be formed. The method includes providing a layer of conductive features, the layer including at least two line members disposed on a substrate and spaced from one another by less than or equal to an effective distance, and at least one such line member also having a via member extending away from the substrate, depositing a poorly conformal dielectric coating to form an air gap between such line members, and exposing a top end of the via.

This application is a divisional of co-pending U.S. patent applicationSer. No. 13/013,108, filed Jan. 25, 2011, the entire contents of whichare incorporated herein by reference.

FIELD OF THE INVENTION

The present invention relates to a semiconductor structure, and a methodof fabricating the same. More particularly, it relates to nano-scalesemiconductor structures selectively isolated by air gaps that can bereliably formed into interconnect metallization with reduced capacitivecoupling.

BACKGROUND OF THE INVENTION

Generally, integrated circuits include a complex network of conductiveinterconnects fabricated on a semiconductor substrate in whichsemiconductor devices have been formed. Efficient routing of theseinterconnects requires formation of multilevel or multilayered schemes,such as, for example, single or dual damascene wiring structures.

Within an interconnect structure, conductive vias run perpendicular tothe semiconductor substrate and conductive lines run parallel to thesemiconductor substrate. According to conventional damascene processing,lines and vias are created within a dielectric layer. A dielectric layeris patterned to create grooves which become lines and holes which becomevias. Metal is deposited on the patterned surface such as byelectroplating to fill the grooves and holes. Excess is removed, such asby CMP, thereby forming lines along the top of a given dielectric layer,and forming vias which extend below the lines in order to connect to anunderlying layer.

There is a continuing need to increase density by, for example,shrinking the size of the conductive interconnects. As feature sizecontinues to decrease, the limitations of copper electroplating to fillfeatures formed in dielectric are increasingly apparent. Coppertypically requires a barrier layer to prevent it from migrating anddegrading the insulating capacity of surrounding dielectric material.Shrinking the feature size generally requires higher aspect ratios,which are increasingly difficult to fill, and furthermore, the barrierlayer cannot scale and hence constitutes a greater fraction of anyparticular feature.

Feature density can also be increased by reducing the spacing betweenfeatures, but closely spaced features can suffer from increasedcapacitive coupling. Low k dielectrics, having k value of 3.0 or less,can be employed but are susceptible to TDDB (time dependent dielectricbreakdown) and are challenging to etch, leading to issues such as poorprofile control, voids, and collapse. Air gaps have much lower k valueapproaching 1.0, but pose various fabrication challenges. Several priorart references utilize a sacrificial material, form interconnectstructure by dielectric damascene, then remove the sacrificial materialto open air gaps below or between such interconnect structure. See,e.g., U.S. Pat. No. 7,595,555, U.S. Pat. No. 7,329,602, U.S. Pat. No.6,861,332, and U.S. Pat. No. 6,908,829. These techniques requirelithography and other processes in order to selectively remove thesacrificial material.

An alternative to forming the interconnect structure by copper damasceneis subtractive metal etch (“SME”). U.S. Pat. No. 5,668,398 proposedusing a sacrificial layer to fill between SME structures, utilizinglithography steps to remove the sacrificial material, like in the abovecases. U.S. Pat. No. 6,399,476 (“Kim et al.”) discloses forming air gapsbetween lines formed by SME by a “multilayer passivation process” thatavoids use of a sacrificial material. Referring to FIG. 1A, which isFIG. 4 of Kim et al., an intermetal dielectric layer 104 is disposedover a first metal interconnection 102. Second spaced metalinterconnections 106 are formed by depositing a second metal layer overlayer 104 and etching according to a patterned photoresist (col. 4,lines 26-39). The photoresist is removed and features 106 are coatedwith a multilayer dielectric. The first layer 108 is “deposited thicklyat the top portion, specifically top sides of the second metalinterconnections, while being deposited very thin at the bottom sides”thereby modifying the space between adjacent conductors to have “arelatively narrow opening size as compared to the size of its bottom.”(col. 3, lines 50-58 and col. 4, lines 47-66). A second layer 112 of themultilayer dielectric is deposited “to a thickness condition that formsair gaps 114” (col. 5, lines 4-7). A “third conventional passivationlayer 116” is then deposited and planarized. According to Kim et al., “aconventional photography process is conducted and a metal contact pad(not shown) is formed in the third passivation layer 116 to the selectedsecond metal interconnections. Subsequently, a process for forming othermetal interconnections is further carried out.” ['476 col. 5 lines25-35].

However, a problem with the technique of Kim et al. can arise uponattempting to connect a subsequent layer of metal interconnections.Referring now to FIG. 1B, to do so requires forming a patterned mask 120and forming openings 121 and 122 through the dielectric to expose anunderlying metal wire. As feature sizes shrink, alignment of the maskwith underlying wires is increasingly difficult, therefore landing(i.e., forming the vertical interconnect exactly on the underlying wire)is also. Etching through a misaligned opening 122 can pierce layer 112and form opening 131 into the adjacent air gap 114. Even with betteralignment, over etching or just an unfortunately located flaw in layer112, can puncture the encapsulated air gap. During subsequent depositionof a next metal layer, the open air gap will fill with metal,potentially shorting the adjacent features.

SUMMARY OF THE INVENTION

According to the present invention, the problem of interconnectingmultiple layers of metallization, such layers having effective air gapspositioned in regions most susceptible to capacitive coupling, is solvedby forming lines as well as vias that extend above such lines within agiven layer of conductive material before depositing material to formair gaps between pairs of closely spaced features within that layer. Theinvention enables reliable formation of semiconductor interconnectstructures without multiple additional lithography steps or sacrificialdielectric material.

According to one embodiment, a method to form interconnectedmetallization layers includes: providing a layer of conductive features,the layer including at least two line members disposed on a substrateand spaced from one another by less than or equal to an effectivedistance, and at least one such line member also having a via memberextending away from the substrate, depositing a coating to form an airgap between such line members; and exposing a top end of the via. Thecoating can include a poorly conformal dielectric layer. The method canfurther include forming a dielectric layer having a substantially flattop surface over said layer of conductive features prior to saidexposing step. The at least two line members can be spaced by a gaphaving an aspect ratio of greater than or equal to 2.0. The method canfurther include forming an opening into such an air gap, and leastpartially filling such opened air gap.

Another embodiment of the present invention provides a structure thatincludes a first interconnect layer disposed between a substrate and asecond interconnect layer, the first layer having two first-layerfeatures laterally separated by a gap, each first-layer featureincluding a line member and at least one of the first-layer featureshaving a vertical member extending from a first-layer line member to asecond-layer feature in the second interconnect layer. The structureincludes an ILD layer disposed over top surfaces of the first-layer linemembers, where a bottom surface of said ILD layer defines a void in suchgap. The second interconnect layer overlies the ILD layer and isconductively isolated from the first-layer line members except by thevertical member. The first-layer features can be formed of a metal thatcan be dry-etched.

In yet another embodiment of the invention, a method is provided to forminterconnect wiring layers by providing a layer of conductive features,the features including line members disposed on a substrate and a viaextending up from at least one such line member; depositing ILD over theconductive features such that an air gap is formed between adjacent linemembers where they are separated by an effective distance; exposing atop surface of the via; and forming a second conductive layer over theILD, such second conductive layer conductively contacting the topsurface of the via. The method can include forming a dielectric layerhaving a substantially flat top surface above said via prior to theexposing step. The first-layer features can be formed by subtractivemetal etch. The exposing step can be achieved without photolithography.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B show a prior art interconnect structure employing an airgap.

FIGS. 2A and 2B show respectively a plan and perspective view ofexemplary conductive features of an interconnect structure layeraccording to an aspect of the present invention.

FIG. 3A and 3B show respectively a cutaway side view and a plan view atheight BB of the structure of FIG. 2B after deposition of a dielectriclayer over the conductive features.

FIGS. 4 and 5 show the structure of FIG. 3A after filling theinterconnect structure layer.

FIGS. 6A and 6B show a second layer of interconnect structure on a firstlayer of interconnect structure according to an embodiment of thepresent invention.

FIG. 7 shows an opening formed over an air gap according to anembodiment of the present invention.

FIG. 8A and 8B show a cutaway side view and a top view at height BB ofthe structure of FIG. 7 after a deposition process step.

DETAILED DESCRIPTION OF THE INVENTION

Embodiments of the present invention will now be described in greaterdetail by reference to the drawings that accompany the presentapplication. It is noted that the drawings of the present applicationare provided for illustrative purposes only and are not drawn to scale.

In the following description, numerous specific details are set forth,such as particular structures, components, materials, dimensions,processing steps and techniques, in order to provide a thoroughunderstanding of the present invention. However, it will be appreciatedby one of ordinary skill in the art that the invention may be practicedwithout these specific details. In other instances, well-knownstructures or processing steps have not been described in detail inorder to avoid obscuring the invention.

It will be understood that when an element as a layer, region orsubstrate is referred to as being “on” or “over” another element, it canbe directly on the other element or intervening elements may also bepresent. In contrast, when an element is referred to as being “directlyon” or “directly over” another element, there are no interveningelements present. It will also be understood that when an element isreferred to as being “connected” or “coupled” to another element, it canbe directly connected or coupled to the other element or interveningelements may be present. In contrast, when an element is referred to asbeing “directly connected” or “directly coupled” to another element,there are no intervening elements present.

Referring now to FIGS. 2A and 2B, the method according to an embodimentof the present invention employs a conductive layer 210 formed into aplurality of lines 211, 212, 213, and 214 disposed on substrate 201.Substrate 201 may comprise a semiconducting material, a conductivematerial or combinations thereof. If substrate 201 comprises asemiconducting material, it can be any semiconducting material such asSi, SiGe, SiGeC, SiC, Ge alloys, GaAs, InAs, InP and other III/V orII/VI compound semiconductors. The semiconducting material can also be alayered semiconductor such as, for example, Si/SiGe, Si/SiC,silicon-on-insulators (SOIs) or silicon germanium-on-insulators (SGOIs).Further, the semiconducting material of substrate 201 can be singlecrystalline, polycrystalline, amorphous, or have a combination of atleast two of a single crystalline portion, a polycrystalline portion,and an amorphous portion. In addition to these listed types ofsemiconducting materials, the present invention contemplates cases inwhich substrate 201 is a layered semiconductor such as, for example,Si/SiGe, Si/SiC, silicon-on-insulators (SOIs) or silicongermanium-on-insulators (SGOIs). When the substrate comprises asemiconducting material, one or more semiconductor devices such as, forexample, complementary metal oxide semiconductor (CMOS) devices can befabricated thereon. The top surface of substrate 201 may comprise aninsulating material, which can be an organic insulator, an inorganicinsulator or a combination thereof including multilayers.

If substrate 201 comprises a conducting material, it can be, forexample, polySi, an elemental metal, alloys of elemental metals, a metalsilicide, a metal nitride or combinations thereof including multilayers.When the substrate comprises a combination of an insulating material anda conductive material, the substrate may represent a first interconnectlevel of a multilayered interconnect structure. Though not shown in theFigures, the interconnect structure of metal layer 210 can connect tointerconnect structure or devices within substrate 201.

Referring now to FIG. 2B, vias 221, 222, and 224 extend respectivelyfrom lines 211, 212, and 214, extending up or away from substrate 201.Line 212 is spaced from line 211 by a gap g12, so gap g12 is defined byfacing sides surfaces g121 (of line 211) and g122 (of line 212). Line213 is spaced from line 212 by a gap g23, which has side surfaces g232and g233. Line 214 is spaced from line 213 by a gap g34. Vias 221, 222,and 224 can have the same width as the line from which they extend. FIG.2B shows vias 221, 222, and 224 with depth approximately equal to width,and with a rectilinear cross section. Note that although the lines andvias are illustrated as having flat, vertical sides, features can beformed to various shapes including sloped or curved sides, or unequalheights, and vias can have ovate or round cross section, any of whichcan be employed within the present invention.

The lines and vias of conductive layer 210 can be formed by asubtractive metal etch process, such as that described in co-pendingapplication U.S. application Ser. No. 12/885,665, hereby incorporated byreference. Conductive layer 210 can be any conductive material that canbe dry etched or patterned (such as W) including but not limited to Al,Cr, Hf, Ir, Mo, Nb, Os, Re, Rh, Ru, Ta, Ti, W, V, Zr, and alloysthereof. Conductive layer 210 is preferably formed by one or more ofAluminum, Ruthenium, Tantalum, Titanium or Tungsten. Conductive layer210 can be a single, integral layer comprising a single deposition ofconductive material, or can be a composite of two or more layers, whichlayers can be the same material or can comprise two or more separatelydeposited materials. Optionally, lines may be formed of anearlier-deposited material comprising layer 210, while vias are formedof a later-deposited material comprising layer 210.

Subtractive metal etch can define conductive features spaced by aminimal dimension, such as the critical dimension (‘CD’) for aparticular lithography node, and form high aspect ratio gaps. At anypoint between adjacent lines, the aspect ratio (‘AR’) would be theheight of such point vs the separation between the lines at that givenpoint. Between adjacent vias, the aspect ratio is the depth (i.e., thedistance perpendicular to the separation and to the height) to whichfacing surfaces of adjacent vias are parallel vs the separation betweenthe vias. When at least one of adjacent vias has a round cross section,there is essentially no depth of facing surfaces, so the aspect ratio ispractically zero. Accordingly, the shape of adjacent conductive featuresdetermines the aspect ratio of an intervening gap. Between adjacentlines, the aspect ratio of a gap can be well above 1.0, such as between2.0 and 10.0, and can be even higher.

A poorly conformal dielectric layer can be deposited over exposedsurfaces by known processes. Referring to FIG. 3A, a layer 250 ofdielectric material can be deposited over the structure of FIG. 2B.Layer 250 can be formed of any dielectric material that can form apoorly conformal layer, which material can be SiO2, NBlock, or SiCOH, orcombinations thereof. As the layer forms across the top and otherwell-exposed surfaces of line members, including, e.g., the top edges ofsides g232 and g233 that constitute the sides of gap g23, the layer canpinch together 252, restricting and eventually preventing furthermaterial from entering the deeper regions of the gap. This tendency isleveraged in the present invention to form air gaps 261 and 262respectively in gaps g12 and g23. The upper portion of air gap 261 isdefined by an interior or lower surface of layer 250. The lower portionof air gap 261 is defined by the substrate and lower surfaces of thefacing sidewalls g121 and g122, to the extent such lower and substratesurfaces are not coated by dielectric layer 250. Air gap 262 issimilarly defined except involving the facing sidewalls of lines 212 and213.

The effective distance or spacing between features (‘AG’) that issufficient to form an air gap is a function of the gap aspect ratio andthe thickness of layer 250, as well as the deposition process andproperties of layer 250. AG can be substantially larger than CD. So longas features are separated by less than or equal to the effectivedistance, a void or air gap can be formed in the intervening gap. Thelarger the aspect ratio of the gap, the more effective an air gap can beformed.

FIG. 3A shows the features of FIG. 2B covered with layer 250, cut awayat line AA of FIG. 2A across lines 211, 212, and 213, and cut away atline aa of FIG. 2A across vias 221 and 222. As noted, the layout of thefeatures of layer 210 can be designed and arranged such that gap g12 hasa sufficiently high aspect ratio and width less than AG, to reliablyform air gap 261 between lines 211 and 212. According to the presentinvention, vias 221 and 222 can be configured such that layer 250 fillsthe space between the vias as shown in FIG. 3A. For example, if eithervia had a round cross section, then deposition of layer 250 to form airgap 261 can fully fill the space between vias 221 and 222. If the viashave facing flat sides, then so long as the extent (depth) of suchfacing sides is less than or equal to the separation between the vias,deposition of layer 250 to form air gap 261 can fill the space betweenvias 221 and 222.

FIG. 3B shows, at height BB of FIG. 3A, air gaps 261 and 262 formedrespectively between lines 211 and 212 and between lines 212 and 213.Just as layer 250 can pinch off the top of an air gap by forming a thicklayer over adjacent upper edges of closely spaced features, FIG. 3Bshows that layer 250′ (at height BB) can also pinch off the ends of anair gap. Between lines 211 and 212 which are the same length, parallel,and aligned, air gap 261 has about the same length the adjacent lines.Between lines 212 and 213, which are parallel and aligned the fulllength of 212 but line 213 is longer so they are not aligned on one end,air gap 262 may be slightly longer than line 212. If adjacent parallellines (spaced less than AG) were offset, then an air gap could be formedessentially just between the overlapped portion. Layer 250′ hasapproximately uniform thickness, t, on the surfaces and ends of thelayer 210 features that are more than a distance AG from another layer210 feature, and is substantially thinner or non-existent along thesides of the air gaps, that thickness depending on the height of BB. Gapg34 between lines 213 and 214 is greater than AG, so no air gap formsbetween those features.

Referring now to FIG. 4, insulation layer 270 can be formed over layer250 to a depth equal to or greater than the vertically extending vias.Since layer 250 can form a continuous surface over and around lines andvias of conductive layer 210, insulation layer 270 can fill above layer250, while voids 261 and 262 remain sealed and unfilled. Dielectricmaterial 270 can be any interlevel or intralevel dielectric (ILD),including inorganic dielectrics or organic dielectrics, and can beporous or non-porous. Examples of suitable dielectrics that can be usedas dielectric material 270 include, but are not limited to SiN, SiC,SiO2, silsesquioxanes, C doped oxides (i.e., organosilicates) thatinclude atoms of Si, C, O and H, including porous versions of theforegoing, or combinations thereof. Dielectric material 270 can bedeposited utilizing any conventional deposition process including, butnot limited to chemical vapor deposition (CVD), plasma enhanced chemicalvapor deposition (PECVD), spin-on coating, evaporation, and chemicalsolution deposition. Spin-on coating can be preferable by resulting inless overburden and thereby reducing the need for or demand upon asubsequent planarization step such as CMP. If layer 250 did not fullypinch off the top or sides of an air gap, the material of layer 270should have a viscosity high enough that it does not fill the air gapupon spin-on or other deposition.

Layer 270 can be planarized or can be formed with a substantially flattop surface 272. Surface 272 can be masked and etched by conventionallithography to expose top ends of vias 221, 222, and 224, but accordingto the present invention, the via top ends can be exposed without usinga mask. The entirety of surface 272 can be recessed to expose the viaends as shown in FIG. 5 by any method including chemical mechanicalpolish (CMP) or any etching process (including dry etching and chemicalwet etching) that selectively etches the dielectric materials 270 and250. Typically, the dielectric recess process employed in the presentinvention includes a chemical etching process or a reactive ion etchingprocess. Alternatively layer 270 can be formed having top surface 272roughly coplanar with the via top ends such that minimal removal, suchthat ILD etch back, rather than CMP, is sufficient to smooth the surfaceand expose the top ends of vias 221, 222, and 224. According to anembodiment, layer 270 can be recessed more deeply whereby the top endsand the top-most side surfaces of vias 221, 222, and 224 are exposed(see FIG. 6A). Recessing can be achieved by conventional processingusing wet or dry etching, or in the case of a low-k dielectric by O2plasma followed by HF etch.

The features of layer 210 can be configured so that air gaps only formbetween the lines yet do not substantially extend into the space betweenthe vias. As such, at least the top ends and optionally even asubstantial portion of the upper side surfaces of the vias can beexposed while an effective thickness M of dielectric material separatesthe recessed surface 272 from any underlying air gap.

The invention contemplates multiple interconnect layers, at least onesuch layer having conductive lines within a lower portion of the layerand at least one via conductively extending to an overlying layer, thedepth of such at least one layer substantially filled by dielectricmaterial such that the conductive features are embedded (except whereair gaps form). As is known, in addition to the conductive anddielectric materials already identified, the at least one suchinterconnect layer can also include inter-level insulating barrierlayers.

As shown in FIG. 6A, a second conductive layer 310 can be formed oversurface 272 and in conductive contact with vias of layer 210 withoutundue risk of breaching and having metal partially fill the embedded airgaps. So long as the at least one via of layer 210 extends above anassociated line by distance greater than M, then the dielectric stackwithin which layer 210 is embedded can be recessed to expose the viaends without employing any lithography or mask.

Referring to FIG. 6B, layer 310 can be patterned to form a secondinterconnect layer conductively connected to the features of layer 210.Just as described above, layer 310 can be patterned to form a pluralityof lines 311 and at least one via 321 extending from one of suchplurality. Deposition of layer 350 (which can be formed of the samematerial and by the same process as layer 250) can form air gaps 360between closely spaced lines, while filling between adjacent vias.Deposition and planarization or recess of layer 370 (which can be formedof the same material and by the same process as layer 270) can completea second interconnect layer in conductive contact with a firstinterconnect layer.

As described, the present invention can be used to form air gaps withina layer of conductive features just between closely spaced lines.According to another embodiment, it may be preferable to replace an airgap with a different insulation. For example, there may be closelyspaced lines separated by a kerf region or between which heatdissipation is more critical than low dielectric properties. Forwhatever reason, the present invention also encompasses a method toselectively remove an air gap formed by the techniques described above.Referring again to FIG. 4, layer 270 can be deposited over layer 250,but in this embodiment layer 270 can be a patterning film or stack offilms terminating in patterned photoresist, which can be deposited byspin-coating thereby forming a substantially flat top surface 272, andcan be patterned and developed by conventional methods. For example, asshown in FIG. 7, surface 272 can be patterned to form an opening 275aligned over air gap 262 between lines 212 and 213. Opening 275 can besized to expose the full extent of the underlying air gap, or just aportion as shown in FIG. 7. That portion of layer 250 exposed by opening275 can be etched to open air gap 262. The etch process can be timed orotherwise controlled to eliminate the material of layer 250 underopening 275. The material can be partially or completely removed.Referring now to FIG. 8A, remnants of patterning film 270 can optionallybe removed and deposition of dielectric layer 280 can fill the openedgap. Air gap 262 can be eliminated or just trimmed by adjusting theextent to which the material of layer 250 is removed within opening 275and the properties and process for depositing dielectric layer 280. FIG.8B illustrates that at height BB above substrate 201, air gap 262 is nowtrimmed.

While the present invention has been particularly shown and describedwith respect to preferred embodiments thereof, it will be understood bythose skilled in the art that the foregoing and other changes in formsand details may be made without departing from the spirit and scope ofthe present invention. It is therefore intended that the presentinvention not be limited to the exact forms and details described andillustrated, but fall within the scope of the appended claims.

1.-8. (canceled)
 9. A structure formed according to the methodcomprising: providing a layer of conductive features including at leasttwo line members disposed on a substrate, at least one said line memberconnected to a via member extending away from said substrate, said atleast two said line members spaced from one another by less than orequal to an effective distance; depositing a coating to form an air gapbetween said line members; and exposing a top end of said via; formingan opening into said air gap, and depositing dielectric material ontosaid coating and at least partially filling said opened air gap.
 10. Thestructure of claim 9 comprising: a first interconnect layer disposedbetween the substrate and a second interconnect layer, said first layerhaving two first-layer features, each including a line member and atleast a first of said first-layer features having a vertical memberextending from a first-layer line member to a second-layer feature insaid second interconnect layer, said two first-layer features laterallyseparated by a gap; an ILD layer disposed over top surfaces of saidfirst-layer line members, a bottom surface of said ILD layer defining avoid in said gap; said second interconnect layer overlying said ILDlayer and conductively isolated from said first-layer line membersexcept by said vertical member.
 11. The structure of claim 10 whereinsaid first-layer features are formed of a metal that can be dry etched.12.-20. (canceled)